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About this Materials Science article
Low-energy SiC 2 H 6+ and SiC 3 H 9+ ion beam productions by the mass-selection of fragments produced from hexamethyldisilane for SiC film formations by Yoshimura, Satoru; Sugimoto, Satoshi; Murai, Kensuke; Kiuchi, Masato is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Yoshimura, Satoru; Sugimoto, Satoshi; Murai, Kensuke; Kiuchi, Masato
- Publisher
- American Institute of Physics; American Institute of Physics Inc.; Melville NY: American Institute of Physics; AIP Publishing (ISSN 2158-3226)
- Published
- 2016
- Field
- Materials Science (Physical Sciences)