About this Engineering article
Kinetics of Phosphorus Predeposition in Silicon Using POCl3 by Negrini, P. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Negrini, P.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
- Published
- 1975
- Field
- Engineering (Physical Sciences)