About this scholarly article

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Tuning forks in silicon by Buser, R.A.; de Rooij, N.F. is a scholarly article available to read on EtoBox.

Author

Buser, R.A.; de Rooij, N.F.

Publisher

IEEE

Published

1989