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About this scholarly article
ECS Transactions - Carbon Incorporation in SiGe Epi Films to Block Boron Diffusion by Deleglise, Florence; Dutartre, Didier; Talbot, Alexandre is a scholarly article available to read on EtoBox.
- Author
- Deleglise, Florence; Dutartre, Didier; Talbot, Alexandre
- Publisher
- ECS
- Published
- 2006
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