About this scholarly article

2012 IEEE International Interconnect Technology Conference - Tungsten plug corrosion on B2H6-based nucleation layer induced by WCMP process by Chen, Kuang-Wei; Ko, Meng-Tsung; Chen, Chun-Fu; Hung, Yung-Tai; Su, Chin-Ta; Yang, Ta-Hone; Chen, Kuang-Chao; Lu, Chih-Yuan is a scholarly article available to read on EtoBox.

Author

Chen, Kuang-Wei; Ko, Meng-Tsung; Chen, Chun-Fu; Hung, Yung-Tai; Su, Chin-Ta; Yang, Ta-Hone; Chen, Kuang-Chao; Lu, Chih-Yuan

Publisher

IEEE

Published

2012

Language

EN