Opening book details…
About this Engineering article
Simulation of ALD chemistry of (nBu3P)2Cu(acac) and Cu(acac)2 precursors on Ta(110) surface by Hu, Xiao; Schuster, Jörg; Schulz, Stefan E.; Gessner, Thomas is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hu, Xiao; Schuster, Jörg; Schulz, Stefan E.; Gessner, Thomas
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2015
- Field
- Engineering (Physical Sciences)
More by Hu, Xiao; Schuster, Jörg; Schulz, Stefan E.; Gessner, Thomas
Browse all works by Hu, Xiao; Schuster, Jörg; Schulz, Stefan E.; Gessner, Thomas