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About this Engineering article

High-Speed Deposition of SiC Thick Film by Halide Precursor by Han, Ming Xu; Zhou, Wei; Zheng, Ding Heng; Tu, Rong; Zhang, Song; Goto, Takashi is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Han, Ming Xu; Zhou, Wei; Zheng, Ding Heng; Tu, Rong; Zhang, Song; Goto, Takashi
Publisher
Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9795)
Published
2014
Language
EN
Field
Engineering (Physical Sciences)

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