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Silvaco ATHENA MOSFET Fabrication Guide by Nabilah Aziz is a document available to read on EtoBox.

What is Silvaco ATHENA MOSFET Fabrication Guide about?

This document discusses a lecture on process modeling and simulation using Silvaco ATHENA. It provides step-by-step instructions for fabricating a MOSFET device through processes like oxidation, implantation, deposition and etching. It then describes extracting design parameters and performing electrical characterization of the fabricated device. Additional examples of process simulations are also included.

Author

Nabilah Aziz

Language

EN