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About this Engineering article
Electrical and optical properties of Nb-doped TiO[sub 2] films deposited by dc magnetron sputtering using slightly reduced Nb-doped TiO[sub 2−x] ceramic targets by Sato, Yasushi; Sanno, Yuta; Tasaki, Chihiro; Oka, Nobuto; Kamiyama, Toshihisa; Shigesato, Yuzo is a Engineering article available to read on EtoBox.
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- Author
- Sato, Yasushi; Sanno, Yuta; Tasaki, Chihiro; Oka, Nobuto; Kamiyama, Toshihisa; Shigesato, Yuzo
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2010
- Language
- EN
- Field
- Engineering (Physical Sciences)