About this Physics and Astronomy article
Using point defect engineering to reduce the effects of energy nonmonochromaticity of B ion beams on shallow junction formation by Shao, Lin; Chen, John; Zhang, Jianming; Tang, D.; Patel, Sanjay; Liu, Jiarui; Wang, Xuemei; Chu, Wei-Kan is a Physics and Astronomy article available to read on EtoBox.
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- Author
- Shao, Lin; Chen, John; Zhang, Jianming; Tang, D.; Patel, Sanjay; Liu, Jiarui; Wang, Xuemei; Chu, Wei-Kan
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 2004
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)