About this scholarly article

2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - La2O3 insulators prepared by ALD using La(iPrCp)3 source: Self-limiting growth conditions and electrical properties by Ozawa, Kenji; Kouda, Miyuki; Urabe, Yuji; Yasuda, Tetsuji; Kakushima, Kuniyuki; Ahmet, Parhat; Iwai, Hiroshi is a scholarly article available to read on EtoBox.

Author

Ozawa, Kenji; Kouda, Miyuki; Urabe, Yuji; Yasuda, Tetsuji; Kakushima, Kuniyuki; Ahmet, Parhat; Iwai, Hiroshi

Publisher

IEEE

Published

2010