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About this Engineering article

Competition Between Gettering by Implantation-Induced Cavities in Silicon and Internal Gettering Associated with SiO2 Precipitation by McHugo, S. A.; Weber, E. R.; Myers, S. M.; Petersen, G. A. is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
McHugo, S. A.; Weber, E. R.; Myers, S. M.; Petersen, G. A.
Publisher
Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
Published
1996
Field
Engineering (Physical Sciences)

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