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About this Engineering article
Competition Between Gettering by Implantation-Induced Cavities in Silicon and Internal Gettering Associated with SiO2 Precipitation by McHugo, S. A.; Weber, E. R.; Myers, S. M.; Petersen, G. A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- McHugo, S. A.; Weber, E. R.; Myers, S. M.; Petersen, G. A.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1996
- Field
- Engineering (Physical Sciences)
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