About this scholarly article

Superior Chemical–mechanical Polishing Performance of Silica Slurries Made of Surface-active Siloxane/acrylic Polymers by P.-L. Kuo; C.-L. Liao; S. K. Ghosh is a scholarly article available to read on EtoBox.

Author

P.-L. Kuo; C.-L. Liao; S. K. Ghosh

Publisher

Springer (ISSN 0340-255X)

Published

2001

Language

EN

ISBN

9780039601003