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Can I read On the Dynamic Response of Electrostatic MEMS Switches on EtoBox?
On the Dynamic Response of Electrostatic MEMS Switches by V. Leus; D. Elata is a Engineering article available to read on EtoBox.
What is On the Dynamic Response of Electrostatic MEMS Switches about?
The undamped dynamic response of electrostatic MEMS switches that are driven by a step-function voltage is investigated. A systematic analysis using energy methods is presented. An analytic expression for switching time is derived and this expression may be used as a design rule for electrostatic switches. The analytic predictions are validated experimentally using test structures with parallel-plates actuators. It is shown that the analysis is also applicable for switches with more general geometry.
Who reads On the Dynamic Response of Electrostatic MEMS Switches?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- V. Leus; D. Elata
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)