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Can I read Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution on EtoBox?
Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution by ISO/TC 201/SC 2 General procedures is a reference work available to read on EtoBox.
What is Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution about?
ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm. Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.
Who reads Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution?
It is typically read by working professionals who need an authoritative practice reference.
Common subject areas: medicine, law, business, engineering.
- Author
- ISO/TC 201/SC 2 General procedures
- Publisher
- ISO
- Published
- 2006
- Language
- EN
- Category
- reference
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