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About this scholarly article
SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Bulk micromachining for sensors and actuators by Esashi, Masayoshi; Peeters, Eric; Paul, Oliver is a scholarly article available to read on EtoBox.
- Author
- Esashi, Masayoshi; Peeters, Eric; Paul, Oliver
- Publisher
- SPIE
- Published
- 2000
- Language
- EN
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