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About this Engineering article
Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition by Otani, Y.; Okamura, Soichiro; Shiosaki, Tadashi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Otani, Y.; Okamura, Soichiro; Shiosaki, Tadashi
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9795)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)
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