About this scholarly article

SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 21 January 2006)] Photon Processing in Microelectronics and Photonics V - Micro/nanoscale surface modification and structuring using lasers by Lu, Y. F.; Okada, Tatsuo; Arnold, Craig B.; Meunier, Michel; Holmes, Andrew S.; Geohegan, David B.; Träger, Frank; Dubowski, Jan J. is a scholarly article available to read on EtoBox.

Author

Lu, Y. F.; Okada, Tatsuo; Arnold, Craig B.; Meunier, Michel; Holmes, Andrew S.; Geohegan, David B.; Träger, Frank; Dubowski, Jan J.

Publisher

SPIE

Published

2006

Language

EN