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About this Engineering article
1.6 Composition and stress state of thin films deposited by ion beam sputtering by RN Castellano; MR Notis; GW Simmons is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- RN Castellano; MR Notis; GW Simmons
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 1977
- Language
- EN
- Field
- Engineering (Physical Sciences)