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Optimized calibration method for Fourier transform infrared phase-modulated ellipsometry by E. Garcia-Caurel; E. Bertran; A. Canillas is a Engineering article available to read on EtoBox.

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A new calibration method for FTIR phase-modulated ellipsometry is presented. This procedure is based on the multiple-harmonic modulation model and takes into account the effect of the multiple re ̄ections of the beam between the modulator faces. With this procedure all the Bessel function background in the wavenumber range from 950 to 3500 cm 21 is removed. When this is achieved, the ellipsometric angles C and D can be determined accurately using any of the standard measurement con®gurations. The measurement of the thickness of an amorphous silicon dioxide thin ®lm, thermally grown on a crystalline silicon substrate, is used as a quality test of the new calibration procedure. FTIR phase-modulated ellipsometry and UV±vis phase-modulated ellipsometry results agree within 0.1%, indicating that the FTIR measurements performed with the new optimized calibration method are accurate.

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Author

E. Garcia-Caurel; E. Bertran; A. Canillas

Publisher

Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)

Published

1999

Language

EN

Field

Engineering (Physical Sciences)