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Photolithography is a crucial microfabrication process that transforms digital designs into physical patterns on a wafer using light to pattern a photoresist layer. The workflow involves substrate preparation, photoresist application, pattern transfer, and development, ultimately allowing for the creation of complex structures like interdigitated electrodes. This technique is foundational to the semiconductor and MEMS industries, enabling the production of intricate electronic devices.
- Author
- madhanrajkulandaivelu
- Language
- EN