About this scholarly article

2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Nano-lithography using self-assembled block-copolymer for patterned media by Asakawa, K.; Hiraoka, T.; Hieda, H.; Sakurai, M.; Kamata, Y.; Naito, K. is a scholarly article available to read on EtoBox.

Author

Asakawa, K.; Hiraoka, T.; Hieda, H.; Sakurai, M.; Kamata, Y.; Naito, K.

Publisher

Japan Soc. Appl. Phys

Published

2002

Language

EN