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About this Engineering article
Effect of electrode architecture and process parameters on distribution of SiH3 in a PECVD system by Jianning Ding; Yazhi Zhao; Ningyi Yuan; Mingming Chen; Shubo Wang; Feng Ye; Biao Kan is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Jianning Ding; Yazhi Zhao; Ningyi Yuan; Mingming Chen; Shubo Wang; Feng Ye; Biao Kan
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 2011
- Field
- Engineering (Physical Sciences)