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About this Engineering article
Nickel-silicide Phase Effects on Flatband Voltage Shift and Equivalent Oxide Thickness Decrease of Hafnium Silicon Oxynitride Metal-silicon-oxide Capacitors by Kang, Chang Yong; Lysaght, Pat; Choi, Rino; Lee, Byoung Hun; Rhee, Se Jong; Choi, Chang Hwan; Akbar, M. S.; Lee, Jack C. is a Engineering article available to read on EtoBox.
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- Author
- Kang, Chang Yong; Lysaght, Pat; Choi, Rino; Lee, Byoung Hun; Rhee, Se Jong; Choi, Chang Hwan; Akbar, M. S.; Lee, Jack C.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2005
- Field
- Engineering (Physical Sciences)