About this scholarly article

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Sunday 3 April 2016)] Optical Micro- and Nanometrology VI - Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding by Gorecki, Christophe; Asundi, Anand K.; Osten, Wolfgang; Wang, Wei-Shan; Wiemer, Maik; Froemel, Joerg; Enderlein, Tom; Gessner, Thomas; Lullin, Justine; Bargiel, Sylwester; Passilly, Nicolas; Albero, Jorge; Gorecki, Christophe is a scholarly article available to read on EtoBox.

Author

Gorecki, Christophe; Asundi, Anand K.; Osten, Wolfgang; Wang, Wei-Shan; Wiemer, Maik; Froemel, Joerg; Enderlein, Tom; Gessner, Thomas; Lullin, Justine; Bargiel, Sylwester; Passilly, Nicolas; Albero, Jorge; Gorecki, Christophe

Publisher

SPIE

Published

2016