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Investigation of an upflow cold-wall CVD reactor by gas phase Raman spectroscopy by Chinho Park; Jang Yeon Hwang; Min Huang; Timothy J. Anderson is a Engineering article available to read on EtoBox.

What is Investigation of an upflow cold-wall CVD reactor by gas phase Raman spectroscopy about?

The gas phase dynamics of an inverted, stagnation point flow CVD reactor were studied by both experiment and modeling. The axial centerline temperature profile in the reactor was measured by analysis of the rotational Raman spectra from the carrier gas (N or H ) as a function of the inlet flow velocity and the reactor aspect ratio. It was found that a larger temperature gradient 2 2 normal to the susceptor surface was obtained with higher gas flow velocity, larger aspect ratio, and the use of a N carrier gas. ## 2 A two-dimensional axisymmetric model with detailed heat transfer descriptions predicted the experimental data well. The validated model clearly demonstrates that recirculation flows are less likely in inverted reactor geometry.

Who reads Investigation of an upflow cold-wall CVD reactor by gas phase Raman spectroscopy?

Author

Chinho Park; Jang Yeon Hwang; Min Huang; Timothy J. Anderson

Publisher

Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)

Published

2002

Language

EN

Field

Engineering (Physical Sciences)