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Can I read AlN thin films prepared by ion beam induced chemical vapour deposition on EtoBox?
AlN thin films prepared by ion beam induced chemical vapour deposition by J.C Sánchez-López; L Contreras; A Fernández; A.R González-Elipe; J.M Martin; B Vacher is a Engineering article available to read on EtoBox.
What is AlN thin films prepared by ion beam induced chemical vapour deposition about?
q ## Ž . AlN thin films have been prepared by bombardment of a suitable substrate with a beam of accelerated N ions 400 eV while a flow 2 of an organometallic precursor is directed onto its surface. This procedure has resulted in very compact and dense films of AlN obtained at room temperature. Since the films were amorphous by XRD, the formation of an AlN phase has been confirmed by different spectroscopies, while the morphology and optical properties of the films have been characterized by electron microscopy and ultraviolet-visible absorption. q 1998 Elsevier Science S.A.
Who reads AlN thin films prepared by ion beam induced chemical vapour deposition?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J.C Sánchez-López; L Contreras; A Fernández; A.R González-Elipe; J.M Martin; B Vacher
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1998
- Language
- EN
- Field
- Engineering (Physical Sciences)