About this scholarly article

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - A low-temperature parylene-C-to-silicon bonding using photo-patternable adhesives and its applications by Chang, Jay Han-Chieh; Liu, Yang; Tai, Yu-Chong is a scholarly article available to read on EtoBox.

Author

Chang, Jay Han-Chieh; Liu, Yang; Tai, Yu-Chong

Publisher

IEEE

Published

2013