Opening book details…
About this Engineering article
New high-efficiency quasi-continuous operation of an ArF(B→X) excimer lamp excited by microwave discharge by Kumagai, Hiroshi; Obara, Minoru is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kumagai, Hiroshi; Obara, Minoru
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1989
- Field
- Engineering (Physical Sciences)