About this Engineering article
Improvement in the moisture barrier properties and flexibility by reducing hydrogen dangling bonds in SiNx thin films with plasma surface treatment by Kim, Sun Jung; Yong, Sang Heon; Ahn, Hyung June; Shin, Yooncheol; Chae, Heeyeop is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kim, Sun Jung; Yong, Sang Heon; Ahn, Hyung June; Shin, Yooncheol; Chae, Heeyeop
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 2020
- Field
- Engineering (Physical Sciences)