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About this Engineering article
Concept for Processing of Silicon Check Valves by Proton Beam Micromachining by Cs. Dücso ̋; I. Rajta; P. Fürjes; E. Baradács is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Cs. Dücso ̋; I. Rajta; P. Fürjes; E. Baradács
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2007
- Language
- EN
- Field
- Engineering (Physical Sciences)
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