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About this Physics and Astronomy article

Ion Mass and Energy Selective Hyperthermal Ion-beam Assisted Deposition Setup by Gerlach, J. W.; Schumacher, P.; Mensing, M.; Rauschenbach, S.; Cermak, I.; Rauschenbach, B. is a Physics and Astronomy article available to read on EtoBox.

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Author
Gerlach, J. W.; Schumacher, P.; Mensing, M.; Rauschenbach, S.; Cermak, I.; Rauschenbach, B.
Publisher
American Institute of Physics; AIP Publishing (ISSN 0034-6748)
Published
2017
Language
EN
Field
Physics and Astronomy (Physical Sciences)

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