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About this Engineering article

The effect of ultra-thin Al 2 O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon by Yan, L; Kong, L B; Ong, C K is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Yan, L; Kong, L B; Ong, C K
Publisher
Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0268-1242)
Published
2004
Language
EN
Field
Engineering (Physical Sciences)