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ChemInform Abstract: Low Temperature Atmospheric Pressure Chemical Vapor Deposition for Epitaxial Growth of SiGe Bipolar Transistors. by SEDGWICK, T. O. ;GRUETZMACHER, D. A. is a Chemistry article available to read on EtoBox.

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Author
SEDGWICK, T. O. ;GRUETZMACHER, D. A.
Publisher
John Wiley and Sons; Wiley (John Wiley & Sons); Wiley (ISSN 0931-7597)
Published
2010
Field
Chemistry (Physical Sciences)

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