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About this Engineering article
Morphology, composition and thermal stability of thin SiO2/HfO2 layers grown on silicon by electron-beam evaporation in vacuum by Boryakov, A. V.; Vikhorev, A. S.; Ershov, A. V.; Zubkov, S. Yu.; Karzanov, V. V.; Nikolichev, D. E. is a Engineering article available to read on EtoBox.
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- Author
- Boryakov, A. V.; Vikhorev, A. S.; Ershov, A. V.; Zubkov, S. Yu.; Karzanov, V. V.; Nikolichev, D. E.
- Publisher
- Pleiades Publishing; Pleiades Publishing Ltd (ISSN 1027-4510)
- Published
- 2013
- Field
- Engineering (Physical Sciences)