About this Engineering article
Recrystallization of AlNx (x<1) thin films induced by N implantation by Kobayashi, K.; Namba, S.; Fujihana, T.; Kobayashi, T.; Dai, Y.; Iwaki, M. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kobayashi, K.; Namba, S.; Fujihana, T.; Kobayashi, T.; Dai, Y.; Iwaki, M.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1988
- Field
- Engineering (Physical Sciences)