About this document

SEMIF63 by pete is a document available to read on EtoBox.

This document is a draft revision of the SEMI F63 guide for ultrapure water (UPW) used in semiconductor processing, aimed at aligning with the International Technology Roadmap for Semiconductors (ITRS) for modern fabs. It outlines recommended UPW quality parameters, introduces new metrics, and emphasizes the importance of ongoing updates every two years. The guide serves as a reference for establishing performance criteria, process control parameters, and quality expectations for UPW in semiconductor manufa

Author

pete

Language

EN