About this scholarly article

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Characterization of organometallic polymers generated post-RIE/ECR etching followed by in-situ microwave ashing by Switalski, Debbie; Solis, Randy; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K. is a scholarly article available to read on EtoBox.

Author

Switalski, Debbie; Solis, Randy; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.

Publisher

SPIE

Published

1994

Language

EN