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About this Engineering article
Ion Energy Distributions and Sidewall Profiles in Reactive Ion Etching by May, P.W.; Field, David P.; Klemperer, D.F.; Song, Y.P. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- May, P.W.; Field, David P.; Klemperer, D.F.; Song, Y.P.
- Publisher
- Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)
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