About this document
Understanding Microelectromechanical Systems (MEMS) by Animesh Jain is a document available to read on EtoBox.
MEMS are small integrated devices that combine electrical and mechanical components ranging in size from sub-micrometers to millimeters. Examples include inkjet printer cartridges, sensors, and actuators. MEMS extend integrated circuit fabrication techniques to add mechanical elements like beams, gears, and springs. The microfabrication allows for large arrays of simple devices to perform complex functions through combination.
- Author
- Animesh Jain
- Language
- EN