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This paper presents the design and analysis of fiber optic microprobe displacement sensors, specifically collimated and convergent types, for high-precision displacement measurement. The study addresses the limitations of traditional micro-Fabry–Perot interferometric structures by proposing a micro-Michelson interference approach that enhances accuracy and measurement distance. Experimental results demonstrate that the designed probes achieve a displacement resolution of 0.4 nm, with a working distance of 4

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24050754176

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EN