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About this Physics and Astronomy article
Perpendicular-flow, Single-wafer Atomic Layer Deposition Reactor Chamber Design for Use with in Situ Diagnostics by Kimes, W. A.; Moore, E. F.; Maslar, J. E. is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Kimes, W. A.; Moore, E. F.; Maslar, J. E.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0034-6748)
- Published
- 2012
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)
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