Opening book details…
About this Engineering article
X-ray photoelectron spectroscopy analyses of metal stacks etched in Cl2/BCl3 high density plasmas by P. Czuprynski is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- P. Czuprynski
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 1998
- Field
- Engineering (Physical Sciences)