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Ion-chromatographic study of interactions in HF–H3PO4–HNO3 semiconductor etchants by L.E Vanatta; D.E Coleman is a Chemistry article available to read on EtoBox.
What is Ion-chromatographic study of interactions in HF–H3PO4–HNO3 semiconductor etchants about?
From ion chromatography, combinations of concentrated HF, H PO and HNO were found to generate a fourth species, 3 4 3 H PO F. A thorough ion chromatographic study was undertaken to determine the role of each species in the equilibrium 2 3 reaction, and to quantitate the final concentrations of the acids. Mixture-design experiments were generated and conducted systematically. Statistical data analyses resulted in prediction equations for the relevant components. An additional or different parameter (possibly activity) was found to be necessary to explain the behavior completely. However, these quantities were not available and concentrations provided reasonable empirical explanations; therefore, units of weight percent were used throughout. A Dionex DX 500 ion chromatograph and JMP statistical software were used for the study.
Who reads Ion-chromatographic study of interactions in HF–H3PO4–HNO3 semiconductor etchants?
It is typically read by researchers, students, and practitioners in Chemistry.
- Author
- L.E Vanatta; D.E Coleman
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 1873-3778)
- Published
- 1998
- Language
- EN
- Field
- Chemistry (Physical Sciences)