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About this Engineering article
First-principles Analysis of Precursor-surface Reaction Pathways Relevant to Plasma Deposition of Silicon Thin Films by Bakos, T.; Maroudas, D. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Bakos, T.; Maroudas, D.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0093-3813)
- Published
- 2005
- Field
- Engineering (Physical Sciences)