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Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability by E. Majkova; Y. Chushkin; M. Jergel; S. Luby; V. Holy; I. Matko; B. Chenevier; L. Toth; T. Hatano; M. Yamamoto is a Engineering article available to read on EtoBox.

What is Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability about?

Results of comprehensive characterization of Sc/Cr multilayers for soft X-ray mirrors working in the water window range (2.4 -4.4 nm) are presented. Multilayer samples were prepared by ion beam sputtering with up to 250 periods in a range of 1.3 -1.75 nm. They were analyzed by transmission electron microscopy (TEM), high resolution TEM, X-ray diffractometry, specular X-ray scattering and diffuse X-ray scattering. The TEM inspection showed good periodicity of the multilayer structure. From simulation studies of the specular reflectivity and a reciprocal space map of the diffuse scattering, it follows that the effective roughness of interfaces is 0.25 -0.28 nm, being equal to the geometrical roughness data. Lateral and vertical correlation lengths of the roughness are 7 and 35 nm, respectively. Heat treatment study of the Sc/Cr multilayers revealed a reasonable thermal stability. An increase of the multilayer period of 2.4% was observed after 33 h annealing at 280 -C and a considerable decrease of reflectivity followed above 300 -C annealing for 3 h, which corresponds to the low mutual miscibility between Sc and Cr.

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Author

E. Majkova; Y. Chushkin; M. Jergel; S. Luby; V. Holy; I. Matko; B. Chenevier; L. Toth; T. Hatano; M. Yamamoto

Publisher

Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)

Published

2006

Language

EN

Field

Engineering (Physical Sciences)