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SPIE Proceedings [SPIE San Dieg - DL Tentative - San Diego, CA (Sunday 1 July 1990)] Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection - Nomarski viewing system for an optical surface profiler by Bietry, Joseph; Auriemma, R. A.; Bristow, Thomas C.; Merritt, Edward; Grover, Chander P. is a scholarly article available to read on EtoBox.

Author
Bietry, Joseph; Auriemma, R. A.; Bristow, Thomas C.; Merritt, Edward; Grover, Chander P.
Publisher
SPIE
Published
1991
Language
EN