Can I read A Novel R2R Control Strategy With Virtual Structure Deployment and Rolling Wave Control Plan on EtoBox?

A Novel R2R Control Strategy With Virtual Structure Deployment and Rolling Wave Control Plan by acela3248 is a document available to read on EtoBox.

What is A Novel R2R Control Strategy With Virtual Structure Deployment and Rolling Wave Control Plan about?

This paper introduces a novel run-to-run (R2R) control strategy utilizing virtual structure deployment and a rolling wave control plan, aimed at overcoming measurement limitations in semiconductor manufacturing. The approach employs virtual metrology based on circuit design to predict and adjust process parameters, specifically tested in DRAM manufacturing. Results indicate successful yield improvements by effectively managing contact area issues during production.

Author

acela3248

Language

EN