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Titanium Nitride Film on Sapphire Substrate with Low Dielectric Loss for Superconducting Qubits by Hao Deng; Zhijun Song; Ran Gao; Tian Xia; Feng Bao; Xun Jiang; Hsiang-Sheng Ku; Zhisheng Li; Xizheng Ma; Jin Qin; Hantao Sun; Chengchun Tang; Tenghui Wang; Feng Wu; Wenlong Yu; Gengyan Zhang; Xiaohang Zhang; Jingwei Zhou; Xing Zhu; Yaoyun Shi; Hui-Hai Zhao; Chunqing Deng is a Physics and Astronomy article available to read on EtoBox.
What is Titanium Nitride Film on Sapphire Substrate with Low Dielectric Loss for Superconducting Qubits about?
Dielectric loss is one of the major decoherence sources of superconducting qubits. Contemporary highcoherence superconducting qubits are formed by material systems mostly consisting of superconducting films on substrate with low dielectric loss, where the loss mainly originates from the surfaces and interfaces. Among the multiple candidates for material systems, a combination of titanium nitride (TiN) film and sapphire substrate has good potential because of its chemical stability against oxidization and its high quality at interfaces. In this work, we report a TiN film deposited onto sapphire substrate achieving low dielectric loss at the material interface. Through the systematic characterizations of a series of transmon qubits fabricated with identical batches of TiN base layers but different geometries of qubit shunting capacitors with various participation ratios of the material interface, we quantitatively extract the loss-tangent value at the substrate-metal interface, which is smaller than 8.9 × 10 -4 in a 1-nm disordered layer, and a limiting quality factor of about 7.3 million. By optimizing the interface participation ratio of the twodimensional (2D) transmon qubit, we r
Who reads Titanium Nitride Film on Sapphire Substrate with Low Dielectric Loss for Superconducting Qubits?
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Hao Deng; Zhijun Song; Ran Gao; Tian Xia; Feng Bao; Xun Jiang; Hsiang-Sheng Ku; Zhisheng Li; Xizheng Ma; Jin Qin; Hantao Sun; Chengchun Tang; Tenghui Wang; Feng Wu; Wenlong Yu; Gengyan Zhang; Xiaohang Zhang; Jingwei Zhou; Xing Zhu; Yaoyun Shi; Hui-Hai Zhao; Chunqing Deng
- Publisher
- American Physical Society (APS)
- Published
- 2023
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)