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About this Materials Science article
Local bonding in PECVD-SiOxNy films by D. Criado; M.I. Alayo; M.C.A. Fantini; I. Pereyra is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- D. Criado; M.I. Alayo; M.C.A. Fantini; I. Pereyra
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-3093)
- Published
- 2006
- Language
- EN
- Field
- Materials Science (Physical Sciences)
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